The Canadian numbers, at the Government of Canada site, show about 0.011 % = 0.00011 = about 1 serious adverse event in every 9,091 immunizations.
https://health-infobase.canada.ca/co...accine-safety/
Compared to most surgeries, such as kidney donation, with a risk of death of about 1 in a 1,000 , that doesn't seem too bad.
Perhaps, the worst vaccine was early on for polio.
In April 1955 more than 200 000 children in five Western and mid-Western USA states received a polio vaccine in which the process of inactivating the live virus proved to be defective. Within days there were reports of paralysis and within a month the first mass vaccination programme against polio had to be abandoned. Subsequent investigations revealed that the vaccine, manufactured by the California-based family firm of Cutter Laboratories, had caused 40 000 cases of polio, leaving 200 children with varying degrees of paralysis and killing 10.
https://www.ncbi.nlm.nih.gov/pmc/articles/PMC1383764/